Applications - Plasma

  • Descum
  • Photoresist Strip
  • Advanced Packaging

AXIC offers several table-top and small format systems for your plasma processing needs.  Every AXIC plasma system has configurable electrodes for various sized parts.  Parallel plate and barrel electrodes are available.  Additionally, large area powered tray electrodes are available for volume processing.

Application Notes:

Plasma Cleaning - PDF 958 KB
Plasma and Wettability of Surfaces - PDF 519 KB
Photoresist Stripping - PDF 1,428 KB
Characteristics of Dry Etching - PDF 779 KB
Plasma De-process for Failure Analysis - PDF 655 KB