The systems are designed for deposition and/or etch of thin films on solar cell wafers. Single or
multi-layers are readily processed, and a pre-etch can be provided.
Up to 12 wafers can be loaded into the transfer cassette and placed in the cassette transfer
module. Wafers are moved by the robot into the process module for the specific process, deposition
or etch. Upon deposition/etch completion, the wafers are then moved to another chamber
for additional processing or returned to the cassette load/unload module.