&#8226; &nbsp; Liquid Cooled - Rhodium (or Tungsten) Target X-Ray Tube with Recirculator<br />
&#8226; &nbsp; 30 kV - 20 mA Fully Regulated Feedback Controlled X-Ray Power Supply<br />
&#8226; &nbsp; Helium Environment Spectrometer with Low Delta Pressure, allowing the use of a Large Detector Window for Analysis<br />
&#8226; &nbsp; Wafer Remains In Air<br />
&#8226; &nbsp; Simultaneous XRF-WDS/EDS Analysis<br />
&#8226; &nbsp; Proportional Counter Detectors Provide High Sensitivity and Do Not Require LN2<br />
&#8226; &nbsp; Accepts Wafers to 8 inches in diameter (12 inch optional)<br />
&#8226; &nbsp; Fast Analysis<br />
&#8226; &nbsp; Internal Reference Calibration