•   Load locked cluster tool
•   Cassette to cassette processing
•   Up to 4 coatings can be deposited without breaking vacuum
•   Substrate sizes: 125 x 125mm,156 x 156mm and 200mm dia.
    (smaller sizes can be processed using a carrier)
•   Typical coatings: SiOx & SiNx - doped & undoped & a- Si
•   R&D, Pilot production and production capabilities
•   RIE chambers available
•   Full computer control
•   Process chamber is modular and interfaced with 200mm slot valve