&#8226; &nbsp; Single chamber and dual chamber versions<br />
&#8226; &nbsp; Single-piece chamber construction<br />
&#8226; &nbsp; In-situ electrode spacing (PECVD version)<br />
&#8226; &nbsp; Replaceable gas showerhead<br />
&#8226; &nbsp; Proven process recipes<br />
&#8226; &nbsp; Field-proven components<br />
&#8226; &nbsp; Endpoint detection (option)<br />
&#8226; &nbsp; Multiple electrode configurations<br />
&#8226; &nbsp; Auto RF matching<br />
&#8226; &nbsp; Downstream pressure control (option)<br />
&#8226; &nbsp; Computer control with Windows programming<br />
&#8226; &nbsp; Multiple pumping options: mechanical, mechanical/blower, turbo