&#8226; &nbsp;DRIE<br />
&#8226; &nbsp;High rate and low damage etching<br />
&#8226; &nbsp;Submicron etching<br />
&#8226; &nbsp;Low temperature-low damage PECVD of SiO2 and Si3N4<br />
&#8226; &nbsp;Polyimide etching Passivation etching<br />
&#8226; &nbsp;Carbon nanotube deposition