&#8226; &nbsp;Small tabletop design<br />
&#8226; &nbsp;Available in two RF frequencies : LF Model [3OKHz] and the HF Model [13.56 MHz] <br />
&#8226; &nbsp;The LF/HF-8 will accommodate the processing of eight [8] inch or smaller substrates<br />
&#8226; &nbsp;Interchangeable Chamber And Electrode Modules<br />
&#8226; &nbsp;Variety Of Chamber Materials: SST, Al, Anodized Al<br />
&#8226; &nbsp;Multiple Electrode Configurations: Cage, Tray, RIE, Downstream<br />
&#8226; &nbsp;Proven Process Recipes<br />
&#8226; &nbsp;Field Proven Components<br />
&#8226; &nbsp;End-Point Detection<br />
&#8226; &nbsp;Auto RF Matching<br />
&#8226; &nbsp;Downstream Pressure Control<br />
&#8226; &nbsp;Computer Controlled<br />
&#8226; &nbsp;Multiple Pumping Options