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Axic IsoLok 5000 (h1)

Axic IsoLok 5000 (h2)

Multichamber PECVD/Etch System (h3)

Multichamber PECVD/Etch System (h4)

Multichamber PECVD/Etch System (h5)

Multichamber PECVD/Etch System (h6)

SYSTEM DESCRIPTION

The system includes a central control module that houses the robot chamber. The cluster module consists of the central chamber, wafer handling robot, 4 ports for process chambers, each with gate value access. The central chamber has a vacuum port and vacuum gauges.